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1-3 March 2027
Vienna, Austria

2026 Review

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HSPE 2026 Awards

And The Winners are....

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HEIDELBERG INSTRUMENTS – THE POWER OF DIRECT WRITING

Heidelberg Instruments is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.

Our systems are installed in industrial and academic facilities all over the world. These are used for direct writing and photomask production in various
areas of MEMS/NEMS – for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many other related applications.

With over 35 years of experience and more than 1,000 systems installed worldwide, we can provide lithography solutions specifically tailored to meet all
your micro- and nanofabrication requirements – no matter how challenging.

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